Perkin-Elmer Corp, Norwalk, Connecticut, has won its first order for an Aeble 150 direct-write electron-beam lithography system for use in the manufacture of Gallium Arsenide chips: the order comes from Raytheon Co, which will install it at its Advanced Devices Center for Gallium Arsenide in Andover, Massachusetts next March, where it will be used for creating GaAs devices with geometrics down to 0.25 micron; the value of the order was not given.
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