MKS develops monitoring and control software systems for the manufacturing sector.
Financial terms of the deal, which is expected to close in the first quarter of 2006, have not been disclosed.
Umetrics was founded in 1987 by a chemometrics professor at Umea University. The company’s multivariate data analysis software is well suited for the demands of data managed by complex industrial devices.
Wilmington, Massachusetts-based MKS will integrate the software with its own process sensors for data collection, integration and visualization. A key application is in the semiconductor fab industry where customers are using the technology to convert process data into intelligence.