Now that Oxford Instruments has more or less perfected the technology, US interests reckon they ought to have a local capability, and Lawrence Livermore National Laboratory and Hampshire Instruments Inc, Rochester, New York have teamed up to develop a laser-driven, X-ray lithography system for producing chips on a commercial scale, they announced yesterday: the programme will get $3.2m to fund the first six months’ work from the Defense Advanced Research Projects Agency and Livermore will will transfer its solid state laser technology to Hampshire Instruments to increase the performance of the firm’s X-ray lithography systems.
Content from our partners
