Semiconductor fabrication advanced plasma etching systems manufacturer Lam Research Corp, Fremont, California, has a new agreement with Tokyo Electron Ltd under which the two companies’ Japanese joint venture TEL-LAM Ltd, has been dissolved and converted into a licence arrangement under which Tokyo Electron gets rights to use Lam’s existing technology to manufacture and sell plasma etching systems in Japan; Lam will also establish a Japanese technology center of its own to work with its partner on existing technology, and with Japanese users in developing future technologies for plasma etching and for other semiconductor fabrication equipment.
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