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August 16, 1988

HAMPSHIRE HAS SHRINKOTRONS ALTERNATIVE TO MINI-SYNCHTRONS

By CBR Staff Writer

Could put a damper on Oxford Instruments Plc, but Hampshire Instruments Inc of Rochester, New York has come up with what it believes will be a much cheaper alternative to the mini synchrotrons – shrinkotrons – that the likes of Oxford are developing for generating X-rays that can be used for etching sub-micron integrated circuits: the company’s solution is a pulsed laser that is played onto a metallic surface to generate soft X-rays – and the machines should be on the market next summer at $2m to $3m, much less than a shrinkotron.

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