So many new chip plants are going up in Oregon that Tokyo Electron Ltd reckons it to be worthwhile to build its own plant there to make semiconductor fabrication equipment. The new plant will have annual production value of around $6m in the first year and $60m in the second year. The company is investing $40m in the plant and construction of the factory will begin in January 1996 with production starting in September.The plant will emply 100 initially, rising to 200 in the second year. It will be manufacturing diffusion furnace systems and Low Pressure Chemical Vapour Deposition systems.